Effect of Residual Stress on CSRR Based RF MEMS Filter

Abstract

Effects of residual stress on the electromechanical characteristic of a CSRRs based band reject filter are presented. Realization of such a filter has previously been reported by the authors, [1] neglecting the effect of residual stress on MEMS beam. This paper presents electromechanical simulated results as well as theoretically calculated results with consideration of residual stress effect. Residual stress performance is calculated with respect to actuation voltage and spring constant of fixed-fixed gold metallic beam. It is apparent that the effects of residual stress are quite significant which should be taken into account for all such analysis